Zirconium and niobium supply for Dummies
Zirconium and niobium supply for Dummies
Blog Article
Sweeping the lean angle can increase movie thickness uniformity and sidewall protection although also staying away from significant Electrical power-reflected neutral species for critical processes.
In-situ optical checking and Manage is accessible as a result of Angstrom’s optical checking & Handle package.
Concentrate on rotation and carousel indexing Every have torque perception, protecting against any method problems on account of slips or jams in rotation.
The dimensions, placement, and equipment ratio of each planet are optimized to offer the absolute best possible movie thickness uniformity.
Our Reticle® ion beam sputter deposition programs are developed and engineered to produce precise optical films of the best purity, density, and stability.
If it’s off by even fifty percent a degree, it's going to have an effect on the morphology of such nanostructures noticeably.
Angstrom Engineering® types and engineers Every Reticle® platform to offer our partners during the optics Group the chance to build the films they want with fantastic purity, density, and uniformity, all within a highly repeatable and automated manner.
Our unique layout permits direct or oblique checking of the variable angle phase, eradicating the need for tooling factors or simply a witness glass changer. Find out more with regard to the Optical Checking & Handle deal here.
IBSD processes can also make use of a secondary ion supply for substrate cleansing and energetic help, substrate heating for reactive deposition, As well as in-situ optical checking or ellipsometry for crucial layer thickness termination.
The IBSD procedure results in a hugely energetic flux of deposition substance, resulting in films with enhanced density, hardness, and area roughness as High-purity metal products compared to those deposited by evaporation processes.
The deposition ion supply is directed toward a cloth goal that has been optimized in the two sizing and position for your needed deposition geometry.
Self-aligned ion optics are configured especially for the desired deposition prerequisites and geometry of the procedure.
A low-frequency neutralizer ensures secure beam operation devoid of contamination from a traditional filament.
A shuttered QCM Situated near the substrate delivers feedback to the deposition price and physical thickness with the growing film.
Each individual axis of movement is controlled through Aeres® using precision servo motors, offering better than 0.1 levels of positional accuracy. Entrance side infrared heating bulbs tilt With all the stage to supply a consistent temperature profile for reactive processes.